Fabrication of Micro-Pillar with PCM and X-ray Lithography
نویسندگان
چکیده
Microfabrication is actually a collection of technologies which are utilized in making microdevices. Some of them have very old origins, not connected to manufacturing, like lithography or etching. Electroplating is technique adapted to produce micrometre scale structures, as are various stamping and embossing techniques. Micro-Components are required in a range of new products such as medical devices, Micro-Pillar, Micro-Well, Micro-Chamber Micro-Fluidic Systems. This paper describes the Manufacturing of X-ray Mask with PhotoChemical Machining (PCM) and the Fabrication of Micro-Pillar on Poly-Methyl-Meth-Acrylate (PMMA) with X-ray Lithography Technology. Fabrication of low cost X-ray mask has been done on Brass sheet using PCM. X-ray Lithography is used to obtain high aspect ratio Micro-Pillar for developing Microfluidic system. Synchrotron radiation of Beam line BL-07 at INDUS-2, RRCAT Indore is the source of X-ray for Lithography.
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